Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2006-03-07
2008-11-18
Fuqua, Shawntina (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S405000, C219S411000, C219S121600, C219S121740, C219S121820, C118S724000, C118S725000, C118S050100, C392S416000, C392S418000
Reexamination Certificate
active
07453051
ABSTRACT:
An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear lamps can be placed in various configurations. In accordance with the present invention, tuning devices which are used to adjust the overall irradiance distribution of the light energy sources are included in the heating device. The tuning devices can be, for instance, are lamps or lasers.
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Dority & Manning P.A.
Fuqua Shawntina
Mattson Technology Inc.
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