Data processing: measuring – calibrating – or testing – Calibration or correction system – Temperature
Reexamination Certificate
2002-06-24
2010-06-08
Lau, Tung S (Department: 2863)
Data processing: measuring, calibrating, or testing
Calibration or correction system
Temperature
Reexamination Certificate
active
07734439
ABSTRACT:
A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.
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Dority & Manning P.A.
Lau Tung S
Mattson Technology Inc.
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