Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-03-08
2008-10-21
Lee, Hwa (Andrew) S (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07440115
ABSTRACT:
A method and apparatus for characterizing an object with a wavefront from the object is disclosed. In one embodiment, the apparatus includes: a reticle positioned in a path of the wavefront, the reticle comprising two superimposed linear grating patterns; at least one light detector positioned relative to the reticle to receive a self-image diffraction pattern of the reticle produced by the wavefront; and at least one processor receiving signals from the light detector representative of the self-image diffraction pattern and deriving derivatives associated therewith, the processor using the derivatives to characterize said object.
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Lee Hwa (Andrew) S
Morrison & Foerster / LLP
Ophthonix, Inc.
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