Coating processes – Spraying
Reexamination Certificate
2007-06-05
2007-06-05
Bashore, Alain L. (Department: 1762)
Coating processes
Spraying
C427S424000, C427S427300, C427S256000, C427S058000
Reexamination Certificate
active
10368607
ABSTRACT:
The invention provides a thin-film forming device, a thin-film forming method, a device for manufacturing a liquid crystal display, a method for manufacturing a liquid crystal display, a device for manufacturing a thin-film structure, a method for a thin-film structure, a liquid crystal display, a thin-film structure, and an electronic apparatus, objects are to achieve easy control of thickness of a thin film without using rotation means, cost reduction, and miniaturization of the devices. The thin-film forming device for forming a thin film by applying a coating solution onto a substrate, there can be provided an ejection mechanism having a droplet ejection head for ejecting the coating solution onto the substrate, a moving mechanism capable of relatively moving the positions of the droplet ejection head and the substrate, and a control unit for controlling at least one of the ejection mechanism and the moving mechanism. As a result, the control unit described above can control the thickness of the thin film by changing the coating conditions of the coating solution L by controlling at least one of an ejection operation by the ejection mechanism and a moving operation by the moving mechanism.
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Bashore Alain L.
Oliff & Berridg,e PLC
Seiko Epson Corporation
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