Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-09-04
2007-09-04
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S055000, C355S068000, C359S667000
Reexamination Certificate
active
11132194
ABSTRACT:
A method and system are used to control a characteristic of a beam. The system comprises an illumination system, at least one optical element, a fluid source, and a pressure and/or fluid concentration controller. The illumination system produces a beam of radiation. The at least one optical element has at least one fluid path therethrough through which the beam passes and is capable of changing a characteristic of one or more portions of the beam. The fluid source supplies fluid to the at least one fluid path. The pressure and/or fluid concentration controller controls pressure and/or fluid concentration of the fluid to change the characteristic of the beam, which is positioned between the fluid source and the optical element.
REFERENCES:
patent: 4837794 (1989-06-01), Riordan et al.
patent: 5610683 (1997-03-01), Takahashi
patent: 5883704 (1999-03-01), Nishi et al.
patent: 6404499 (2002-06-01), Stoeldraijer et al.
patent: 6686989 (2004-02-01), Hagiwara et al.
patent: 6704090 (2004-03-01), Nishi
patent: 6870598 (2005-03-01), Nishi
patent: 2005/0140957 (2005-06-01), Luijkx et al.
patent: 2005/0237501 (2005-10-01), Furukawa et al.
patent: 1 524 558 (2005-04-01), None
ASML Holding N.V.
Mathews Alan
Sterne Kessler Goldstein & Fox P.L.L.C.
LandOfFree
System and method utilizing an illumination beam adjusting... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System and method utilizing an illumination beam adjusting..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method utilizing an illumination beam adjusting... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3788283