Optics: measuring and testing – Standard – Surface standard
Reexamination Certificate
2007-04-05
2009-10-20
Toatley, Jr., Gregory J (Department: 2877)
Optics: measuring and testing
Standard
Surface standard
C356S237200
Reexamination Certificate
active
07605915
ABSTRACT:
In one embodiment, a system to create a haze standard on a surface of an object, comprises a radiation targeting assembly that targets a radiation beam onto the surface of the object, a drive assembly to impart relative motion between the radiation targeting assembly and the surface of the object, and a controller to regulate the radiation targeting assembly to deliver radiation at a controlled power level to at least one portion of the surface, thereby forming at least one region having a known haze characteristic.
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patent: 5198869 (1993-03-01), Monteverde et al.
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patent: 5691812 (1997-11-01), Bates et al.
patent: 6836362 (2004-12-01), Potyrailo et al.
patent: 2006/0250593 (2006-11-01), Nishii
Scheer, Bradley. “Development of a physical haze and microroughness standard” SPIE vol. 2862, Nov. 1996, pp. 78-95.
Petrenko Aleksey
Reich Jurgen
Wolters Christian
KLA-Tencor Corporation
Luedeka Neely & Graham P.C.
Slomski Rebecca C
Toatley Jr. Gregory J
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