System and method to control radial delta temperature

Details System and method to control radial delta temperature System and method to control radial delta temperature

2005-03-08

2005-03-08

Van, Quang T. (Department: 3742)

Electric heating

Heating devices

With power supply and voltage or current regulation or...

C219S390000

Reexamination Certificate

active

06864466

ABSTRACT:
A system and method of minimizing stress related to the ramp rate of a variable by limiting the ramp rate as a function of the current value of the variable is provided. More specifically, the present invention provides a system and method of maintaining the radial delta temperature of a semiconductor substrate or other heated body below the crystal slip curve by dynamically controlling the temperature ramp rate during processing.

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