Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-09-05
2006-09-05
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000
Reexamination Certificate
active
07102733
ABSTRACT:
The present invention provides systems and methods for maskless lithographic printing that compensate for static and/or dynamic misalignments and deformations. In an embodiment, a misalignment of a pattern formed by a spatial light modulator is measuring during printing. Rasterizer input data is generated based on the measured misalignment and passed the rasterizer. The rasterizer generates pattern data, based on the rasterizer input data, that is adjusted to compensate for the measured misalignment. The pattern data generated by the rasterizer is passed to the spatial light modulator and used to form a second pattern, which includes compensation for the measured misalignment. In an embodiment, deformations caused, for example, by a warping a surface of the spatial light modulator are measured and used by the rasterizer to generate pattern data that compensates for the deformations.
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Bleeker Arno J.
Latypov Azat M.
Mason Christopher J.
Poultney Sherman K.
ASML Holding N.V.
Nguyen Henry Hung
Sterne Kessler Goldstein & Fox P.L.L.C.
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