Optics: measuring and testing – By polarized light examination – With polariscopes
Reexamination Certificate
2006-07-27
2009-06-16
Stafira, Michael P (Department: 2886)
Optics: measuring and testing
By polarized light examination
With polariscopes
C356S364000
Reexamination Certificate
active
07548315
ABSTRACT:
A system and method are used to compensate for critical dimension non-uniformity caused by different polarization directions in an illumination beam. A system comprises a source of radiation and an optical system. The source of radiation produces a beam of radiation. The optical system is configured to transmit a first portion of the beam having a first polarization direction during a first portion of a cycle and a second portion of the beam having a second polarization direction during a second portion of the cycle.
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ASML Netherlands B.V.
Stafira Michael P
Sterne Kessler Goldstein & Fox P.L.L.C.
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