Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-10-24
2006-10-24
Cabrera, Zoila (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S108000, C702S183000
Reexamination Certificate
active
07127317
ABSTRACT:
The present invention provides an Intelligent Engineering Data Analysis (I-EDA) system and method to help prevent low wafer yield and prevent occurrences of abnormal events. The I-EDA has a non-conforming wafer tracing (NCWT) system that operates to correlate occurrences of abnormal events with low wafer yield. The method generally has the steps of performing a fabrication operation on wafers disposed within a wafer lot; determining if an abnormal event occurred while performing the fabrication operation on the wafers disposed within the wafer lot; using a NCWT to determine a statistical correlation between an occurrence of an abnormal event and a wafer yield of the wafers being processed during the occurrence of the abnormal event if the abnormal event occurred during processing of the wafers disposed within the wafer lot; and using the determined statistical correlation to analyze the fabrication process and thereby improve wafer yield.
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Chi Shiaw-Lin
Chiu Wen Jen
Hsiung Chen Hsin
Hsu Chia Hui
Lan Yu-Jye
Cabrera Zoila
Taiwan Semiconductor Manufacturing Co. Ltd.
Tung & Associates
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