System and method of testing humidity in a sealed MEMS device

Details System and method of testing humidity in a sealed MEMS device System and method of testing humidity in a sealed MEMS device

2008-01-28

2009-08-04

Pak, Sung H (Department: 2874)

Optical waveguides

Miscellaneous

Reexamination Certificate

active

07570865

ABSTRACT:
One embodiment provides a method of testing humidity. The method includes measuring i) a first weight of a first device which encloses a plurality of interferometric modulators and ii) a second weight of a second device which encloses a plurality of interferometric modulators, wherein the first and second devices contain a different amount of water vapor. The method further includes comparing the weights of the first and second devices and determining a relative humidity value or a degree of the relative humidity inside one of the two devices based at least in part upon the weight comparison. In one embodiment, the relative humidity value or degree is determined considering at least one of the following parameters: i) temperature-humidity combination inside at least one of the devices, ii) the thickness and width of a seal of the at least one device, iii) adhesive permeability of a component of the at least one device, iv) a desiccant capacity inside the at least one device and v) a device size.

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