Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2005-05-20
2008-11-04
Lester, Evelyn A. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S291000, C359S298000, C348S770000, C348S771000, C345S085000, C345S108000
Reexamination Certificate
active
07446926
ABSTRACT:
In various embodiments of the invention, a regenerating protective coating is formed on at least one surface of an interior cavity of a MEMS device. Particular embodiments provide a regenerating protective coating on one or more mirror surfaces of an interferometric light modulation device, also known as an iMoD in some embodiments. The protective coating can be regenerated through the addition of heat or energy to the protective coating.
REFERENCES:
patent: 4074480 (1978-02-01), Burton
patent: 4310220 (1982-01-01), Kuwagaki et al.
patent: 4459182 (1984-07-01), te Velde
patent: 4956619 (1990-09-01), Hornbeck
patent: 5018256 (1991-05-01), Hornbeck
patent: 5099353 (1992-03-01), Hornbeck
patent: 5216537 (1993-06-01), Hornbeck
patent: 5244707 (1993-09-01), Shores
patent: 5268533 (1993-12-01), Kovacs et al.
patent: 5331454 (1994-07-01), Hornbeck
patent: 5401983 (1995-03-01), Jokerst et al.
patent: 5411769 (1995-05-01), Hornbeck
patent: 5526172 (1996-06-01), Kanack
patent: 5610438 (1997-03-01), Wallace et al.
patent: 5777705 (1998-07-01), Pierson et al.
patent: 5784189 (1998-07-01), Bozler et al.
patent: 5835255 (1998-11-01), Miles
patent: 5853662 (1998-12-01), Watanabe
patent: 5856820 (1999-01-01), Weigers et al.
patent: 5875011 (1999-02-01), Pierson et al.
patent: 5936758 (1999-08-01), Fisher et al.
patent: 5939785 (1999-08-01), Klonis et al.
patent: 5959763 (1999-09-01), Bozler et al.
patent: 6040937 (2000-03-01), Miles
patent: 6055090 (2000-04-01), Miles
patent: 6107115 (2000-08-01), Atobe et al.
patent: 6120339 (2000-09-01), Alwan
patent: 6127765 (2000-10-01), Fushinobu
patent: 6195196 (2001-02-01), Kimura et al.
patent: 6238755 (2001-05-01), Harvey et al.
patent: 6262696 (2001-07-01), Seraphim et al.
patent: 6303986 (2001-10-01), Shook
patent: 6335255 (2002-01-01), Evaldsson et al.
patent: 6365229 (2002-04-01), Robbins
patent: 6379988 (2002-04-01), Peterson et al.
patent: 6426461 (2002-07-01), Ginter et al.
patent: 6447126 (2002-09-01), Hornbeck
patent: 6455927 (2002-09-01), Glenn et al.
patent: 6462392 (2002-10-01), Pinter et al.
patent: 6465355 (2002-10-01), Horsley
patent: 6466354 (2002-10-01), Gudeman
patent: 6489670 (2002-12-01), Peterson et al.
patent: 6495895 (2002-12-01), Peterson et al.
patent: 6525416 (2003-02-01), Hauser et al.
patent: 6538312 (2003-03-01), Peterson et al.
patent: 6558820 (2003-05-01), Raychaudhuri et al.
patent: 6589625 (2003-07-01), Kothari et al.
patent: 6603182 (2003-08-01), Low et al.
patent: 6650455 (2003-11-01), Miles
patent: 6661084 (2003-12-01), Perterson et al.
patent: 6674159 (2004-01-01), Peterson et al.
patent: 6674562 (2004-01-01), Miles
patent: 6680792 (2004-01-01), Miles
patent: 6690444 (2004-02-01), Wilkinson et al.
patent: 6747800 (2004-06-01), Lin
patent: 6779260 (2004-08-01), Brandenburg et al.
patent: 6843936 (2005-01-01), Jacobs
patent: 6867896 (2005-03-01), Miles
patent: 6870654 (2005-03-01), Lin et al.
patent: 6882458 (2005-04-01), Lin et al.
patent: 6882461 (2005-04-01), Tsai et al.
patent: 6882480 (2005-04-01), Yanagisawa
patent: 6912022 (2005-06-01), Lin et al.
patent: 6947200 (2005-09-01), Huibers
patent: 6952303 (2005-10-01), Lin et al.
patent: 6958847 (2005-10-01), Lin
patent: 6995890 (2006-02-01), Lin
patent: 6999225 (2006-02-01), Lin et al.
patent: 7015885 (2006-03-01), Novotny et al.
patent: 7034984 (2006-04-01), Pan et al.
patent: 7060895 (2006-06-01), Kothari et al.
patent: 7123216 (2006-10-01), Miles
patent: 7126741 (2006-10-01), Wagner et al.
patent: 7161728 (2007-01-01), Sampsell et al.
patent: 7164520 (2007-01-01), Palmateer et al.
patent: 2001/0055146 (2001-12-01), Atobe et al.
patent: 2002/0015215 (2002-02-01), Miles
patent: 2002/0024711 (2002-02-01), Miles
patent: 2002/0043706 (2002-04-01), Jerominek et al.
patent: 2002/0056900 (2002-05-01), Liu et al.
patent: 2002/0070931 (2002-06-01), Ishikawa
patent: 2002/0075551 (2002-06-01), Daneman
patent: 2002/0126364 (2002-09-01), Miles
patent: 2002/0160583 (2002-10-01), Song
patent: 2002/0187254 (2002-12-01), Ghosh
patent: 2003/0020094 (2003-01-01), Shrauger
patent: 2003/0043157 (2003-03-01), Miles
patent: 2003/0054588 (2003-03-01), Patel et al.
patent: 2003/0062186 (2003-04-01), Boroson et al.
patent: 2003/0072070 (2003-04-01), Miles
patent: 2003/0075794 (2003-04-01), Felton et al.
patent: 2003/0108306 (2003-06-01), Whitney et al.
patent: 2003/0144034 (2003-07-01), Hack et al.
patent: 2003/0152872 (2003-08-01), Miles
patent: 2003/0155643 (2003-08-01), Freidhoff
patent: 2003/0183916 (2003-10-01), Heck et al.
patent: 2003/0184412 (2003-10-01), Gorrell
patent: 2004/0037956 (2004-02-01), Yang
patent: 2004/0051929 (2004-03-01), Sampsell et al.
patent: 2004/0061492 (2004-04-01), Lopes et al.
patent: 2004/0076008 (2004-04-01), Ikeda
patent: 2004/0100677 (2004-05-01), Huibers et al.
patent: 2004/0125281 (2004-07-01), Lin et al.
patent: 2004/0140557 (2004-07-01), Sun et al.
patent: 2004/0145811 (2004-07-01), Lin et al.
patent: 2004/0147198 (2004-07-01), Lin et al.
patent: 2004/0163472 (2004-08-01), Nagahara
patent: 2004/0173886 (2004-09-01), Carley
patent: 2004/0175577 (2004-09-01), Lin et al.
patent: 2004/0183990 (2004-09-01), Guang et al.
patent: 2004/0184133 (2004-09-01), Su et al.
patent: 2004/0207897 (2004-10-01), Lin
patent: 2004/0209192 (2004-10-01), Lin et al.
patent: 2004/0209195 (2004-10-01), Lin
patent: 2004/0218251 (2004-11-01), Piehl et al.
patent: 2005/0003667 (2005-01-01), Lin et al.
patent: 2005/0024557 (2005-02-01), Lin
patent: 2005/0035699 (2005-02-01), Tsai
patent: 2005/0036095 (2005-02-01), Yeh et al.
patent: 2005/0036192 (2005-02-01), Lin et al.
patent: 2005/0042117 (2005-02-01), Lin
patent: 2005/0046919 (2005-03-01), Taguchi et al.
patent: 2005/0046922 (2005-03-01), Lin et al.
patent: 2005/0046948 (2005-03-01), Lin
patent: 2005/0068605 (2005-03-01), Tsai
patent: 2005/0068606 (2005-03-01), Tsai
patent: 2005/0074919 (2005-04-01), Patel et al.
patent: 2005/0078348 (2005-04-01), Lin
patent: 2005/0093134 (2005-05-01), Tam
patent: 2005/0168849 (2005-08-01), Lin
patent: 2005/0184304 (2005-08-01), Gupta et al.
patent: 2005/0195462 (2005-09-01), Lin
patent: 2005/0202649 (2005-09-01), Hung et al.
patent: 2005/0253283 (2005-11-01), Dcamp et al.
patent: 2005/0254982 (2005-11-01), Cadeddu
patent: 2006/0029732 (2006-02-01), Kobrin et al.
patent: 2006/0066935 (2006-03-01), Cummings et al.
patent: 2006/0148365 (2006-07-01), Tsai
patent: 2006/0274400 (2006-12-01), Miles
patent: 2007/0170568 (2007-07-01), Palmateer et al.
patent: 0 667 548 (1995-08-01), None
patent: 0 822 570 (1998-02-01), None
patent: 1418154 (2004-05-01), None
patent: 2408620 (2005-06-01), None
patent: 02-068513 (1990-03-01), None
patent: 03-199920 (1991-08-01), None
patent: 2001-318324 (2001-11-01), None
patent: 2002-062491 (2002-02-01), None
patent: 2002-328313 (2002-11-01), None
patent: 2003-233024 (2003-08-01), None
patent: WO 95/01624 (1995-01-01), None
patent: WO 99/41732 (1999-08-01), None
patent: WO 01/58804 (2001-08-01), None
patent: WO 02/42716 (2002-05-01), None
patent: WO 03/026369 (2003-03-01), None
patent: WO 03/054925 (2003-03-01), None
patent: WO 03/084861 (2003-10-01), None
patent: WO 2005/066596 (2005-07-01), None
Ashurst, et al., Dichlorodimethylsilane as an Anti-Stiction Monolayer for MEMS: A Comparison to the Octadecyltrichlosilane Self-Assembled Monolayer, vol. 10, No. 1, Mar. 2001, pp. 41-49.
U.S. Appl. No. 11/048,662, filed Jan. 27, 2005, Cummings et al.
U.S. Appl. No. 11/119,433, filed Apr. 29, 2005, Palmateer et al.
Aratani K., et al., “Surface micromachined tuneable interferometer array,” Sensors and Actuators, pp. 17-23. (1994).
Ashurst, R.W., et al. “Vapor-Phase Anti-Stiction Coatings for MEMS” IEEE transactions o Device and materials reliability vol. 3, No. 4 Dec. 2003, pp. 173-178.
Liang, Zhi-Hao et al., “A Low Temperature Wafer-Level Hermetic MEMS Package Using UV Curable Adhesive”, Electronic Components and Technology Conference, 2004 IEEE, pp. 1486-1491.
Maboudian, R., et al. “Self-Assembled Monolayers as Anti-stiction coatings for MEMS: characteristics and recent developments” Sensors and Actuators 82, (2000) p
IDC LLC
Knobbe Martens Olson & Bear LLP
Lester Evelyn A.
LandOfFree
System and method of providing a regenerating protective... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System and method of providing a regenerating protective..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method of providing a regenerating protective... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4030264