System and method of producing thin-film electrolyte

Details System and method of producing thin-film electrolyte System and method of producing thin-film electrolyte

2005-02-08

2005-02-08

Maples, John S. (Department: 1745)

Metal working

Method of mechanical manufacture

Electrical device making

C429S322000, C429S162000, C423S306000

Reexamination Certificate

active

06852139

ABSTRACT:
A process of producing a thin film electrolyte is provided wherein a volatile lithium-containing precursor and a volatile phosphate-containing precursor are mixed into a plasma generated from a plasma source. The mixture is then deposited upon a substrate. The process is conducted with the use of a system (11) having a plasma source (13) having a primary plenum (16) and a secondary plenum (23). The primary plenum is in fluid communication with a source of nitrogen gas (47) and a source of hydrogen gas (51). The secondary plenum is in fluid communication with a first bubbler (31) and a second bubbler (38).

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