System and method of planar positioning

Details System and method of planar positioning System and method of planar positioning

2006-01-17

2006-01-17

Bennett, G. Bradley (Department: 2859)

Geometrical instruments

Gauge

Collocating

Reexamination Certificate

active

06986211

ABSTRACT:
A system and method of controlling the relationship between two surfaces (such as a primary surface and a reference surface) and correcting any deviation from the desired or ideal relationship generally employ a plurality of actuators and flexural assemblies. The actuators may be driven in unison to translate the primary surface in one-dimension; the actuators may also be driven independently, accommodating fine adjustment in pitch, roll, or both, of the primary surface. Flexural assemblies may be implemented to minimize lateral cross-coupling between the linear actuators.

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