System and method of measuring thermal expansion

Details System and method of measuring thermal expansion System and method of measuring thermal expansion

2006-04-11

2006-04-11

Verbitsky, Gail (Department: 2859)

Thermal measuring and testing

Determination of inherent thermal property

Thermal conductivity

C374S055000, C374S130000, C356S500000, C356S498000, C356S450000, C250S200000

Reexamination Certificate

active

07025498

ABSTRACT:
A chuck having a high specific stiffness and high thermal conductivity compared to conventional chucks, with an apparatus for measuring thermal expansion in the chuck. High specific stiffness allows for a higher control bandwidth and improved scanning performance. High thermal conductivity enables excellent positioning accuracy because thermal expansion and strain may be accurately measured or predicted, and thus compensated.

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