Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate
2011-07-05
2011-07-05
Kim, Robert (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
With detector
C250S3960ML, C250S492100, C250S492300
Reexamination Certificate
active
07973290
ABSTRACT:
The present invention involves a beam energy identification system, comprising an accelerated ion beam, wherein the accelerated ion beam is scanned in a fast scan axis within a beam scanner, wherein the beam scanner is utilized to deflect the accelerated ion beam into narrow faraday cups downstream of the scanner, wherein a difference in scanner voltage or current to position the beam into the Faraday cups is utilized to calculated the energy of ion beam.
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Axcelis Technologies Inc.
Eschweiler & Associates LLC
Ippolito Rausch Nicole
Kim Robert
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