System and method of aligning a sample

Details System and method of aligning a sample System and method of aligning a sample

2009-02-13

2011-11-22

Punnoose, Roy M (Department: 2886)

Optics: measuring and testing

By polarized light examination

C356S369000, C356S139100

Reexamination Certificate

active

08064055

ABSTRACT:
A system and method of use thereof that enables determining and setting sample alignment based on the location of, and geometric attributes of a monitored image formed by reflection of an electromagnetic beam from a sample and into an image monitor, which beam is directed to be incident onto the sample along a locus which is substantially normal to the surface of the sample.

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