Television – Special applications – Manufacturing
Reexamination Certificate
2007-02-06
2007-02-06
Philippe, Gims (Department: 2621)
Television
Special applications
Manufacturing
C356S237100, C356S237500
Reexamination Certificate
active
09553841
ABSTRACT:
The present invention relates to visually monitoring an interior portion of a processing chamber in a semiconductor processing system. An image collector collects images of the interior of the chamber and provides an image signal indicative of a visual representation of the interior of the chamber. A viewing station receives the image signal and displays a visual representation of the interior of the chamber.
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Choo Bryan
Phan Khoi
Rangarajan Bharath
Singh Bhanwar
Advanced Micro Devices , Inc.
Amin Turocy & Calvin LLP
Philippe Gims
Rekstad Erick
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