System and method for visually determining the performance of a

Details System and method for visually determining the performance of a System and method for visually determining the performance of a

1997-07-31

1998-09-15

Evans, F. L.

Optics: measuring and testing

Lens or reflective image former testing

For optical transfer function

G01B 900

Patent

active

058087311

ABSTRACT:
The preferred embodiments of the present invention provide a method and apparatus for visually inspecting features on a wafer that are smaller than can be optically resolved using normally using visible light. By providing a method for visually inspecting the features, the overall performance of the fabrication system can be determined. The preferred method patterns resist with two patterns having different spatial frequencies. The patterns combine to form a pattern in the resist that exhibits Moire beats. The Moire beat spatial frequency of the resulting pattern is significantly lower than the two spatial frequencies used, and thus can be visually inspected using light in the visible regions.

REFERENCES:
Lindsay, et al; "Comparison of state-of-the-art DUV lenses"; The International Society for Optical Engineering, vol. 2440, Feb. 1995; pp. 678-689.
Freischlad, et al; "The International Society for Optical Engineering," vol. 2440, Feb. 1995; pp. 743-749.
Lagerquist, et al; "The International Society for Optical Engineering," vol.2725, Apr. 1996; pp.494-503.
Grenville, et al; "J. Vac.Sci.Technol. B, Microelectron. Nanometer Struct.. (USA), vol. 12, No. 6; Dec. 1994; pp. 3814-3819.

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