System and method for ventilation in the fabrication of...

Details System and method for ventilation in the fabrication of... System and method for ventilation in the fabrication of...

2006-04-25

2006-04-25

Zervigon, Rudy (Department: 1763)

Coating apparatus

Control means responsive to a randomly occurring sensed...

C118S715000, C156S345240, C285S013000, C285S014000, C285S121400

Reexamination Certificate

active

07033442

ABSTRACT:
In the fabrication of semiconductor integrated circuits, a ventilation system is disclosed which includes a sleeve device, a ventilator and a sensor. The sleeve device has at least one aperture thereon for gas transfer. The ventilator is coupled to the sleeve device. The sensor is coupled to the sleeve device. A method of ventilation is also disclosed, which includes a step of sensing a relative movement between a sleeve having at least aperture for gas transfer and a gas outlet connected to a pipeline, and a step of generating a signal to control a ventilator when the relative movement between the sleeve and the gas outlet is sensed.

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