System and method for using phase differences to measure the thi

Details System and method for using phase differences to measure the thi System and method for using phase differences to measure the thi

1993-12-10

1997-03-25

Oda, Christine K.

Measuring and testing

Vibration

By mechanical waves

73602, 73629, G01N 2900

Patent

active

056146752

ABSTRACT:
A system and technique for measuring the thickness of an optical element. A first energy signal of a first phase is transmitted into the element. The first signal reflects off of a distal surface of the element and is detected as a return signal. The phase of the reflected signal is compared to the phase of the transmitted signal and the frequency varied to extract a third signal representing a desired phase difference therebetween. Corresponding frequency data are processed to determine the thickness of the element at the point of transmission of the first signal.

REFERENCES:
patent: 2484623 (1949-10-01), Heising
patent: 3237445 (1966-03-01), Wood
patent: 3595069 (1971-07-01), Fowler
patent: 3741334 (1973-06-01), Kaule
patent: 4062227 (1977-12-01), Heyman
patent: 4624142 (1986-11-01), Heyman
patent: 4875175 (1989-10-01), Egee
patent: 5052227 (1991-10-01), Le Floc'H et al.

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