Data processing: structural design – modeling – simulation – and em – Simulating electronic device or electrical system
Reexamination Certificate
2003-09-30
2011-10-04
Shah, Kamini S (Department: 2128)
Data processing: structural design, modeling, simulation, and em
Simulating electronic device or electrical system
C703S007000, C700S121000, C438S005000
Reexamination Certificate
active
08032348
ABSTRACT:
A method, system and computer readable medium for facilitating a process performed by a semiconductor processing tool. The method includes inputting data relating to a process performed by the semiconductor processing tool and inputting a first principles physical model relating to the semiconductor processing tool. First principles simulation is then performed using the input data and the physical model to provide a first principles simulation result, and the first principles simulation result is used to facilitate the process performed by the semiconductor processing tool.
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Mitrovic Andrej S.
Strang Eric J.
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Saxena Akash
Shah Kamini S
Tokyo Electron Limited
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