Data processing: structural design – modeling – simulation – and em – Simulating electronic device or electrical system
Reexamination Certificate
2003-09-30
2011-10-11
Shah, Kamini S (Department: 2128)
Data processing: structural design, modeling, simulation, and em
Simulating electronic device or electrical system
C703S007000, C700S121000, C438S005000
Reexamination Certificate
active
08036869
ABSTRACT:
A method, system and computer readable medium for controlling a process performed by a semiconductor processing tool. The method includes inputting data relating to a process performed by the semiconductor processing tool, inputting a first principles physical model relating to the semiconductor processing tool, performing first principles simulation using the input data and the physical model to provide a first principles simulation result. The first principles simulation result is used to build an empirical model, and at least one of the first principles simulation result and the empirical model is selected to control the process performed by the semiconductor processing tool.
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Mitrovic Andrej
Strang Eric J.
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Saxena Akash
Shah Kamini S
Tokyo Electron Limited
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