Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-04-11
2006-04-11
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07027162
ABSTRACT:
An optical measurement system increases the number of translational and angular measurements made with a single laser beam by combining an optical interferometer with an optical autocollimator. Translational measurements are made with an optical interferometer and yaw and pitch measurements are made with an autocollimator. In a preferred embodiment, angular deviations in the reflected measuring beam are minimized with a reverse telescopic lens assembly, allowing a wider range of angular measurements without significant degradation of interferometer accuracy.
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Lau Kam C.
Liu Yuanqun
Lyons Michael A.
Toatley , Jr. Gregory J.
Weir Bruce E.
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