Optics: measuring and testing – Position or displacement
Reexamination Certificate
2011-07-12
2011-07-12
Toatley, Gregory J (Department: 2877)
Optics: measuring and testing
Position or displacement
C356S615000, C356S616000, C356S620000
Reexamination Certificate
active
07978344
ABSTRACT:
The system for surface inspection is arranged to detect relative displacement and/or vibration features of a plurality of points of a plurality of elements (51) forming part of a mechanical structure (5), such as a micro- or nanomechanical structure. A light beam is displaced along the mechanical structure along a first trajectory (A), so as to detect a plurality of subsequent reference positions (C) along said first trajectory (A), and the light beam is further displaced along the mechanical structure along a plurality of second trajectories (B), each of said second trajectories (B) being associated with one of said reference positions (C).The invention further relates to a corresponding method and to a program for carrying out the method.
REFERENCES:
patent: 3840301 (1974-10-01), Pryor et al.
patent: 5274230 (1993-12-01), Kajimura et al.
patent: 6708556 (2004-03-01), Kim et al.
patent: 2006/0075803 (2006-04-01), Boisen et al.
patent: 1575058 (2005-09-01), None
patent: 0075627 (2000-12-01), None
patent: 2004/046689 (2004-06-01), None
International Search Report issued Jan. 31, 2007 in International (PCT) Application No. PCT/ES 2006/000405.
European Search Report issued Nov. 10, 2005 in corresponding European Application No. EP 05 38 0157.
Álvarez, Mar, et al., “Optical Sequential Readout of Microcantilever Arrays for Biological Detection”, Sensors and Actuators B 106, Elsevier Sequia, (2005), pp. 687-690.
Lang, H.P., et al., “Sequential Position Readout from Arrays of Micromechanical Cantilever Sensors”, Applied Physics Letters, Melville, NY, US, vol. 72, No. 3, Jan. 19, 1998, pp. 383-385.
Craighead, H.G., et al. “Nanoeletromechanical Systems”, Science, vol. 290, Nov. 2000, pp. 1532-1535.
Martin, Y., et al., “Atomic Force Microscope-Force Mapping and Profiling on a sub 100-AA scale”, Journal of Applied Physics, vol. 61, May 1987, pp. 4723-4729.
Ilic, B., et al., “Mechanical resonant immunospecific biological detector”, Applied Physics Letters, vol. 77, Jul. 2000, pp. 450-452.
Stephan, A.C., et al., “Microcantilever charged-particle flux detector”, Review of Scientific Instruments, 73, Jan. 2002, pp. 36-41.
Vettiger, P., et al., “Ultrahigh density, high-data-rate NEMS-based AFM data storage system”, Microelectronic Engineering, vol. 46, 1999, pp. 11-17.
Engel, A., et al., “Atomic force microscopy: a powerful tool to observe biomolecules at work”, Trends in Cell Biology, vol. 9, Feb. 1999, pp. 77-80.
Vettiger P., et al., “The millipede-more than one thousand tips for future AFM storage”, IBM J. Res Develop., vol. 44, No. 3, May 2000, pp. 323-339.
Meyer, G. et al., “Simultaneous measurement of lateral and normal forces with an optical-beam-deflection atomic force microscope”, Applied Physics Letters, vol. 57, Nov. 1990, pp. 2089-2091.
Jeon, S., et al. “Instant curvature measurement for microcantilever sensors”, Applied Physics Letters, vol. 85, No. 6, Aug. 9, 2004, pp. 1083-1084.
Calleja Gómez Montserrat
Mertens Johan
Tamayo De Miguel Francisco Javier
Consejo Superior de Investigaciones Cientificas
Toatley Gregory J
Underwood Jarreas C
Wenderoth Lind & Ponack, LLP.
LandOfFree
System and method for the inspection of micro and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System and method for the inspection of micro and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for the inspection of micro and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2682799