System and method for the checking of a reactive plasma machine

Details System and method for the checking of a reactive plasma machine System and method for the checking of a reactive plasma machine

1992-12-29

1993-11-09

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156627, 156643, 364131, 364138, 364496, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

052599094

ABSTRACT:
The selection of a formula by an operator on an independent reactive plasma machine using a certain number of reactive gases is checked by making a comparison, at a given instant, between the required flow-rate and the real flow-rate obtained, in associating a false parameter of the flow-rate of the gas with each formula memorized in the machine and by integrating, into the machine, a simulator of a flow controller of this gas which knows false the parameter of the flow-rate associated with the formula that should have been chosen by the operator, and responds with this parameter to the machine which asks for the real flow-rate of this gas.

REFERENCES:
patent: 4736304 (1988-04-01), Joachim

Affiliated with

Also associated with

Rating

System and method for the checking of a reactive plasma machine does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System and method for the checking of a reactive plasma machine, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for the checking of a reactive plasma machine will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1139940