System and method for the analysis of atomic force...

Details System and method for the analysis of atomic force... System and method for the analysis of atomic force...

2006-02-07

2006-02-07

Larkin, Daniel S. (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

C073S081000, C702S189000

Reexamination Certificate

active

06993959

ABSTRACT:
A system and method for the analysis of AFM data is provided. The system and method can be used in conjunction with an atomic force microscopy (AFM) system including a cantilever with a tip used to analyze a sample, the AFM outputting an AFM data file. An exemplary embodiment of the invention includes a computer readable medium storing computer readable program code for causing a computer to receive user input regarding an analysis to be performed and analysis parameters; parse the AFM data file based on the user input to obtain a deflection of the cantilever; determine an indentation depth of the tip into the sample based at least in part on the deflection; select a model of contact mechanics based on the user input; solve the selected model of contact mechanics based on the input analysis using the determined indentation depth; and determine a residual error.

REFERENCES:
patent: 5193383 (1993-03-01), Burnham et al.
patent: 5866807 (1999-02-01), Elings et al.
patent: 6134954 (2000-10-01), Suresh et al.
patent: 6883367 (2005-04-01), Feng et al.

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