Fluid handling – Self-proportioning or correlating systems – Mixture condition maintaining or sensing
Reexamination Certificate
2006-03-17
2009-11-17
Hepperle, Stephen (Department: 3753)
Fluid handling
Self-proportioning or correlating systems
Mixture condition maintaining or sensing
C137S002000, C137S003000
Reexamination Certificate
active
07617836
ABSTRACT:
A supply system for supplying a functional water to a process unit which treats a substrate using the functional water is provided. In the system, the functional water generated in the functional water generator is supplied to a distributor through a functional water supply pipe. Thereafter, the functional water is supplied to the process unit while the process unit performs a process, and the functional water is returned to the functional water generator through a functional water returning pipe while the process unit does not perform a process. A buffer tank is installed in the functional water supply pipe and the concentration of the functional water is measured in a circulation line connected with the buffer tank. When the measured concentration of the functional water goes out of a set concentration range, the functional water is returned to the functional water generator through functional water returning pipe.
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An Doo-Keun
Bae Jeong-Yong
Choi Kwang-Il
Choi Yong-Nam
Jung Pyong-Soon
Harness & Dickey & Pierce P.L.C.
Hepperle Stephen
Semes Co. Ltd.
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