System and method for setting and compensating errors in AOI...

Details System and method for setting and compensating errors in AOI... System and method for setting and compensating errors in AOI...

2006-11-14

2006-11-14

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

Position or displacement

C356S399000

Reexamination Certificate

active

07136172

ABSTRACT:
System and methodology for setting, and compensating detected errors between intended and realized Angle-of-Incidence (AOI) and Plane-Of-Incidence (POI) settings in ellipsometer and the like systems during analysis of sample characterizing data.

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