System and method for sensing pressure

Measuring and testing – Fluid pressure gauge – Diaphragm

Reexamination Certificate

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C073S718000

Reexamination Certificate

active

07017418

ABSTRACT:
A differential pressure sensor for use in an industrial application is described. The differential pressure sensor includes a membrane layer having a covered portion and an exposed portion where a first side of the exposed portion of the membrane layer is in fluid communication to a first aperture and a second side of the exposed portion is in fluid communication to a second aperture. The differential pressure sensor also includes at least one resonating device secured to the covered portion of the membrane layer and configured to oscillate at a desired frequency and a sensing circuitry configured to a detect oscillation in the at least one resonating device indicative of deformation in the membrane layer.

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