System and method for sensing differential pressure

Measuring and testing – Fluid pressure gauge – Diaphragm

Reexamination Certificate

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C073S702000

Reexamination Certificate

active

07490519

ABSTRACT:
A differential pressure sensing system is provided. The sensing system includes a membrane layer having a channel extending diametrically therein, and including one or more cavities provided radially outbound of the channel and at least one resonant beam disposed in the channel and configured to oscillate at a desired frequency. The system further includes sensing circuitry configured to detect oscillation of the at least one resonant beam indicative of deformation in the membrane layer.

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