Coherent light generators – Particular pumping means
Patent
1992-09-10
1993-11-23
Epps, Georgia Y.
Coherent light generators
Particular pumping means
372 10, 372 25, H01S 309
Patent
active
052651142
ABSTRACT:
A laser system and processing method exploits the absorption contrast between the materials from which a link (12) and an underlying substrate (22) are made to effectively remove the link from the substrate. Laser output in a wavelength range of 1.2 to 2.0 .mu.m (30) optimizes the absorption contrast between many high conductivity materials (e.g., metals) and silicon substrates and permits the use of laser output in a wider range of energy or power levels, pulse widths, without risking damage to the silicon substrates or adjacent circuit structures. Existing link processing laser systems can be readily modified to operate in the 1.2 to 3.0 .mu.m range.
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Hutchens Craig D.
Sun Yunlong
Electro Scientific Industries Inc.
Epps Georgia Y.
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