System and method for selective scanning of an object or pattern

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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Details

250234, 25055934, 2505594, 25055906, 356376, 359202, G02B 2610, G01B 1100, G01N 2100

Patent

active

060312254

ABSTRACT:
A system and method for correcting a scan pattern of a moving optical scanning system. A gantry moves an optical system at a constant rate in a first direction. Using a light source and a first deflector, the optical scanning system quickly sweeps a light beam in a direction orthogonal to the motion of the gantry by changing the angle of deflection of the first deflector linearly with time. To compensate for the motion of the gantry, the optical system includes a second deflector which deflects the light, the deflection angle being determined as a function of the velocity of the gantry. The deflected light is focussed on the object (or pattern). Accordingly, the object is scanned along a corrected scan line orthogonal to the X-axis. The optical scanning system may optionally perform "selected" scanning. Also, the optical system optionally employs a "look-ahead/look-behind" scanning approach to further improve the rate at which portions of an object (or pattern) may be inspected.

REFERENCES:
patent: 4788423 (1988-11-01), Cline
patent: 4957369 (1990-09-01), Antonsson
patent: 5463227 (1995-10-01), Stern et al.
patent: 5663825 (1997-09-01), Amon et al.
patent: 5712678 (1998-01-01), Hofmann

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