System and method for reducing speckle noise in die-to-die...

Details System and method for reducing speckle noise in die-to-die... System and method for reducing speckle noise in die-to-die...

2008-01-08

2010-06-15

Stafira, Michael P (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237200

Reexamination Certificate

active

07738092

ABSTRACT:
Systems and methods are provided herein for eliminating speckle noise in die-to-die inspection systems. In one embodiment, an illumination system in accordance with the present invention may include a coherent light source, a diffuser, a first detector, a second detector and a controller. The diffuser may be coupled within an illumination path between the coherent light source and the specimen. In one embodiment, the diffuser may be a rotational diffuser having a variable rotational rate. The first detector may be coupled for detecting a desired position on the specimen. The second detector may be coupled for detecting a rotational position of the diffuser when the desired position on the specimen is detected. The controller may be coupled to: (i) the first and second detectors for determining a difference between the rotational position of the diffuser and the desired position on the specimen, and (ii) the diffuser for adjusting the rotational rate of the diffuser to eliminate the difference.

REFERENCES:
patent: 6081381 (2000-06-01), Shalapenok et al.
patent: 6747781 (2004-06-01), Trisnadi
patent: 7271962 (2007-09-01), Kasazumi et al.
patent: 7304731 (2007-12-01), Hill
patent: 7326623 (2008-02-01), Hongo et al.
patent: 7463350 (2008-12-01), Nishiyama et al.
patent: 7630069 (2009-12-01), Naftali et al.
patent: 2005/0128473 (2005-06-01), Karpol et al.
patent: 2006/0066870 (2006-03-01), Korngut et al.
patent: 2006/0152810 (2006-07-01), Kvamme
patent: 2007/0008519 (2007-01-01), Naftali et al.
patent: 2007/0242253 (2007-10-01), Visser et al.

Affiliated with

Also associated with

Rating

System and method for reducing speckle noise in die-to-die... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System and method for reducing speckle noise in die-to-die..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for reducing speckle noise in die-to-die... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4174693