Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2011-05-31
2011-05-31
Barnes-Bullock, Crystal J (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S121000, C700S225000, C235S462110, C235S462150, C235S462410, C250S492210, C438S007000, C438S016000
Reexamination Certificate
active
07953511
ABSTRACT:
A system and method is disclosed for reducing processing errors during the fabrication of integrated circuit wafers. A 2D dot matrix wafer scribe that contains coded information is placed on a wafer. The coded information contains wafer information such as the wafer lot number. The wafer is then placed in an ion implantation system. A camera in the ion implantation system is then used to photograph the dot matrix wafer scribe on the wafer. The information about the wafer is then decoded from the photograph of the dot matrix wafer scribe. A station controller that operates the ion implantation system then uses the information from the dot matrix wafer scribe to determine whether the wafer is suitable for ion implantation. The wafer is implanted only when the information from the dot matrix wafer scribe matches information about the wafer that has been previously stored in the station controller.
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Barnes-Bullock Crystal J
National Semiconductor Corporation
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