Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate
2006-03-21
2006-03-21
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Reexamination Certificate
active
07016027
ABSTRACT:
A method and system for detecting the quality of an alternating phase shift mask having a number of 180-degree phase shift areas alternating with a number of 0-degree phase shift areas is disclosed. In operation, a light source which provides wavelength-adjustable incident lights illuminates the incident lights on the alternating phase shift mask. The light outputs from boundaries between the 0-degree phase shift areas and the 180-degree phase shift areas of the alternating phase shift mask are detected. Relation curves of the wavelength of the incident light and a light intensity of the boundaries are then calculated. Phase errors of the alternating phase shift mask can thus be measured from the relation curves.
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Butt Shahid
Zaidi Shoaib
Edell Shapiro & Finnan LLC
Lauchman Layla G.
Valentin, II Juan D.
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