Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2008-06-18
2009-10-13
Mathews, Alan A (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S067000, C355S077000, C359S494010, C359S490020
Reexamination Certificate
active
07602475
ABSTRACT:
A lithography system including a polarized illumination source, a birefringence-controllable optical element, a birefringence inducer, a pattern generator, a linear polarizer, and a projection system. The polarized illumination source is configured to provide polarized light. The birefringence-controllable optical element is optically coupled to the polarized illumination source. The birefringence inducer is coupled to the birefringence-controllable optical element and configured to induce birefringence on the birefringence-controllable optical element to provide polarization-retarded polarized light. The pattern generator is optically coupled to the birefringence-controllable optical element. The linear polarizer is optically coupled to the pattern generator and configured (i) to receive the polarization-retarded polarized light and (ii) modify intensity distribution of the polarization-retarded polarized light to provide modified polarization-retarded polarized light. The projection system is configured to project the modified polarization-retarded polarized light.
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ASML Netherlands B.V.
Mathews Alan A
Sterne Kessler Goldstein & Fox P.L.L.C.
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