System and method for processing a substrate and program...

Details System and method for processing a substrate and program... System and method for processing a substrate and program...

2004-04-16

2008-08-05

Shechtman, Sean P (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S011000, C700S023000, C700S086000, C700S121000, C700S169000, C700S181000

Reexamination Certificate

active

07409253

ABSTRACT:
A substrate processing system allows to reduce the number of works that should be done by a software engineer. The system100includes a substrate processing apparatus101; a substrate processing controller102for controlling the substrate processing apparatus101; and a server103for storing therein commands, i.e., instructional statements, for defining an operation of each device. The substrate processing controller102has a RAM105serving as a work space for creating a macro file corresponding to each of processes divided from the whole substrate processing or for changing the content of a macro file; and an executor108composed of, e.g., CPU for executing a process sequence macro obtained by a combination of the created macro files. The user creates a macro file describing a sequential operation of each process or changes the content of a macro file by arranging the stored commands.

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patent: 2002-43290 (2002-02-01), None
patent: 2002-163016 (2002-06-01), None

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