System and method for positioning a product using a laser...

Details System and method for positioning a product using a laser... System and method for positioning a product using a laser...

2011-03-08

2011-03-08

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07903258

ABSTRACT:
A system for positioning a product, comprising a chuck for supporting the product, an intermediate stage supporting said chuck, and a stationary base supporting said intermediate stage. The chuck can move with respect to the intermediate stage in a first direction X, and the intermediate stage can move with respect to said stationary base in a second direction Y. The system furthermore comprises at least one laser interferometer for measuring the position of the chuck relative to the stationary base. The main part of the laser interferometer is attached to the intermediate stage, so that it can measure the distance between a reflector on the chuck and a reflector on the stationary base.

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