Printing – Special article machines – Bed and platen
Reexamination Certificate
2008-04-29
2008-04-29
Colilla, Daniel J. (Department: 2854)
Printing
Special article machines
Bed and platen
C264S408000, C264S293000, C264S313000, C425S406000, C430S322000, C430S330000
Reexamination Certificate
active
11224316
ABSTRACT:
Provided are a method and system for imprinting a pattern formed on surfaces of an imprint mask onto a double-sided substrate. A method includes deforming the surfaces of the first and second imprint stamps to produce respective first and second deformed surfaces, each having an arc therein. A Pressure is applied to bring the deformed first and second surfaces into intimate contact with the first and second substrate surfaces, respectively. The applied pressure substantially flattens the deformed surfaces. And to separate the two surfaces, the applied pressure is released.
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ASML Holding N.V.
Colilla Daniel J.
Sterne Kessler Goldstein & Fox P.L.L.C.
Williams Kevin D.
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