System and method for patterning a flexible substrate in a...

Details System and method for patterning a flexible substrate in a... System and method for patterning a flexible substrate in a...

2007-11-06

2007-11-06

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Image transferred to or from curved surface

C355S053000

Reexamination Certificate

active

11068165

ABSTRACT:
A system and method are used to feed a flexible substrate through a patterned beam to be exposed at target portions by the pattered beam. In one example, the flexible substrate is passed over a chuck (e.g., a vacuum chuck). In one example, the chuck can bias the flexible substrate against a chuck surface during alignment, focus, and exposure operations. By biasing the flexible substrate, the flexible substrate can continuously move while being held against the chuck. In one example, the flexible substrate is fed onto the vacuum chuck from a supply roller and fed off the chuck and wrapped on to a take-up roller. The supply and take-up rollers are rotated to follow the scanning motion, which minimizes or substantially eliminates tension on the flexible substrate during the exposure period.

REFERENCES:
patent: 5652645 (1997-07-01), Jain
patent: 5967048 (1999-10-01), Fromson et al.
patent: 6018383 (2000-01-01), Dunn et al.
patent: 6819424 (2004-11-01), Honma
patent: 2002/0063856 (2002-05-01), Inoue
patent: 63-1545 (1988-01-01), None
patent: 2-100036 (1990-12-01), None
patent: 4-65443 (1992-06-01), None
patent: 2000-122261 (2000-04-01), None
patent: 2000-214595 (2000-08-01), None
patent: 2000-235267 (2000-08-01), None
Office Action for Japanese Patent Application No. 2005-082757 filed Jan. 5, 2007, 4 pgs.

Affiliated with

Also associated with

Rating

System and method for patterning a flexible substrate in a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with System and method for patterning a flexible substrate in a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for patterning a flexible substrate in a... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3806802