System and method for optical sensing of surface motions

Details System and method for optical sensing of surface motions System and method for optical sensing of surface motions

2011-06-07

2011-06-07

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07957006

ABSTRACT:
There is provided an optical perturbation sensing system, including a probing beam incident on a medium, a sensing beam redirected from the medium and incident on a surface area of a photodetector, an array of photodetector elements, and a constructive combiner for constructively combining detected signals from the elements, to form a stronger detected signal. A method for detection of perturbations in a medium is also provided. The invention avoids the need for detection of the phase or the frequency variations of the scattered signal as used in the more complex hitherto-proposed approaches.

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International Search Report for PCT/IL2007/000406 dated Aug. 3, 2007.

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