System and method for on-the-fly eccentricity recognition

Details System and method for on-the-fly eccentricity recognition System and method for on-the-fly eccentricity recognition

2006-01-24

2006-01-24

Nghiem, Michael (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Dimensional determination

Reexamination Certificate

active

06990430

ABSTRACT:
A method of substrate eccentricity detection includes includes determining at least three positions on a perimeter of a first substrate, grouping the at least three perimeter positions to define one or more circles, estimating a location of a center of the first substrate as the location of a center of a predetermined circle approximated from the at least three perimeter positions, and determining an eccentricity vector as a difference between the estimated location and a reference position on a substrate transport mechanism on which the first substrate rests.

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