Coating processes – Coating by vapor – gas – or smoke – Moving the base
Patent
1994-05-24
1995-10-24
Beck, Shrive
Coating processes
Coating by vapor, gas, or smoke
Moving the base
427131, 427132, 427251, 118729, C23C 1600
Patent
active
054608538
ABSTRACT:
A method of sequential deposition of source materials onto a web substrate. A substrate transfer mechanism imparts continuous movement of a substrate past a plurality of deposition sources during vapor deposition of deposition source materials. Every portion of the substrate is exposed to deposition fluxes from the deposition sources in an alternating periodic manner. The number of source exposures is greater than the number of sources.
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Hintz Michael B.
Mitchell William C.
Sexton Joseph H.
Ulseth John W.
Beck Shrive
Griswold Gary L.
Kirn Walter N.
Levinson Eric D.
Minnesota Mining and Manufacturing Company
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