Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2007-02-06
2007-02-06
Budd, Mark (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S316010, C310S323020
Reexamination Certificate
active
11012060
ABSTRACT:
A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The possible displacement of the object is limited by the maximum shear of the piezo actuators. To increase the possible displacement, the piezo actuators may be controlled to perform a linear shear sequence or a shuffle sequence. During the linear shear sequence, the object is moved; during the shuffle sequence the object is substantially stationary, while the piezo actuators are repositioned with respect to the object, after which the object may be moved further using the linear shear sequence.
REFERENCES:
patent: 5714831 (1998-02-01), Walker et al.
patent: 6150750 (2000-11-01), Burov et al.
patent: 6211605 (2001-04-01), Burov et al.
patent: 6457864 (2002-10-01), Chang et al.
patent: 6838808 (2005-01-01), Tanaka
patent: 2003/0226976 (2003-12-01), Tanaka
patent: 197 15 226 (1998-10-01), None
patent: 1 267 478 (2002-12-01), None
patent: 1 311 007 (2003-05-01), None
Egashira, Yoshiya et al., “Sub-Nanometer Resolution Ultrasonic Motor for 300mm Wafer Lithography Precision Stage,”Jpn. J. Appl. Phys., 2002, 41:5858-5863.
Tsai, Kuen-Yu and Yen, Jia-Yush, “Servo System Design of a High-Resolution Piezo-Driven Fine Stage for Step-and-Repeat Microlithography Systems,”IEEE, 1999, 11-16.
Hatamura, Yotaro and Morishita, Hiroshi, “Direct Coupling System Between Nanometer World and Human World,”IEEE, 1990, 203-208.
Sugihara, K. et al., “Piezoelectrically driven XYθ table for submicron lithography systems,”Rev. Sci. Instrum., 1989, 3024-3029.
Yoshiya Egashira, et al., Sub-Nanometer Resolution Ultrasonic Motor for 300 mm Wafer Lithography Precision Stage, pp. 5858-5863, (May 16, 2002).
Hendriks Stefan Gertud Marie
Leenheers Gerardus Jacobus Cornelis Catharina Maria
Mattaar Thomas Augustus
ASML Netherlands B.V.
Budd Mark
Pillsbury Winthrop Shaw & Pittman LLP
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