System and method for monitoring semiconductor production...

Details System and method for monitoring semiconductor production... System and method for monitoring semiconductor production...

2007-08-14

2007-08-14

Von Buhr, M. N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S108000

Reexamination Certificate

active

10619191

ABSTRACT:
A plurality of pieces of process data are acquired from a semiconductor production apparatus while it is in operation, and then, a multivariate analysis model is created using at least a portion of the plurality of pieces of process data.

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Japanese Notice of Reasons for Rejection dated May 15, 2007.

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