System and method for monitoring particles contamination in...

Details System and method for monitoring particles contamination in... System and method for monitoring particles contamination in...

2007-10-16

2007-10-16

Goudreau, George A. (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With measuring, sensing, detection or process control means

C156S345430, C118S722000, C118S733000

Reexamination Certificate

active

11004099

ABSTRACT:
Provided is a particle monitoring system capable of detecting a level of polymer particle contamination on inner walls of a process chamber. Also disclosed is a method of monitoring the level of polymer particle contamination on inner walls of a process chamber.

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