Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1996-04-24
1999-10-12
Nguyen, Vinh P.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324750, 324765, G01R 3128
Patent
active
059660198
ABSTRACT:
A system for measuring a property of a semiconductor substrate, wherein an analyzer beam is generated and transmitted to the substrate, and a generation beam, superposed on top of the analyzer beam, is also generated and transmitted to the substrate. A response generated by the generation beam, in the substrate, causes a change in a predetermined characteristic of the analyzer beam that is measured by a detector. The property of the substrate is then determined from the change in a predetermined characteristic. The property measuring system may be used in a semiconductor fabrication process.
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Boxer Cross Inc.
Nguyen Vinh P.
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