Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2007-10-30
2007-10-30
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
Reexamination Certificate
active
10997210
ABSTRACT:
A system and method for optical offset measurement is provided. An offset between two grating layers in a compound grating is measured by illuminating the gratings with light having a plane of incidence that is neither parallel with nor perpendicular to the grating lines. This non-symmetrical optical illumination allows determination of the sign and magnitude of the offset. Two measurements are performed at azimuthal angles separated by 180°, and a difference of these measurements is calculated. Measurement of this difference allows determination of the offset (e.g., with a calibration curve). Alternatively, two compound gratings having a predetermined non-zero offset difference can be employed. This arrangement permits determination of the offsets without the need for a calibration curve (or for additional compound gratings), based on a linear approximation.
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Chen Shuqiang
Forouhi Abdul Rahim
Li Guoguang
Lumen Intellectual Property Services Inc.
n&k Technology Inc.
Richey Scott M
Toatley , Jr. Gregory J.
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