Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate
2008-01-15
2008-01-15
Nguyen, Sang H. (Department: 2886)
Optics: measuring and testing
Dimension
Thickness
C438S008000, C438S014000
Reexamination Certificate
active
10811738
ABSTRACT:
A system and method is disclosed for measuring a germanium concentration in a semiconductor wafer for manufacturing control of BiCMOS films. Germanium is deposited over a silicon substrate layer to form a silicon germanium film. Then a rapid thermal oxidation (RTO) procedure is performed to create a layer of thermal oxide over the silicon germanium film. The thickness of the layer of thermal oxide is measured in real time using an interferometer, an ellipsometer, or a spectroscopic ellipsometer. The measured thickness of the layer of thermal oxide is correlated to a germanium concentration of the silicon germanium film using an approximately linear correlation. The correlation enables a value of the germanium concentration in the silicon germanium film to be provided in real time.
REFERENCES:
patent: 5256550 (1993-10-01), Laderman et al.
patent: 5298860 (1994-03-01), Kato
patent: 5476813 (1995-12-01), Naruse
patent: 5818596 (1998-10-01), Imai et al.
patent: 5863807 (1999-01-01), Jang et al.
patent: 5982496 (1999-11-01), Ziger
patent: 6010914 (2000-01-01), Shishiguchi
patent: 6277657 (2001-08-01), Nozawa et al.
patent: 6278519 (2001-08-01), Rosencwaig et al.
patent: 6331890 (2001-12-01), Marumo et al.
patent: 6519045 (2003-02-01), Kwon
patent: 6521041 (2003-02-01), Wu et al.
patent: 6573126 (2003-06-01), Cheng et al.
patent: 6639228 (2003-10-01), Yen
patent: 6731386 (2004-05-01), Dautartas et al.
patent: 6759255 (2004-07-01), Xu et al.
patent: 6895360 (2005-05-01), Liu et al.
patent: 06275689 (1994-09-01), None
Budri Thanas
Printy Craig
National Semiconductor Corporation
Nguyen Sang H.
LandOfFree
System and method for measuring germanium concentration for... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with System and method for measuring germanium concentration for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and System and method for measuring germanium concentration for... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3938347